For space constrained tools 5711 μWIRE
Similar to the μWire AeroBar 5710, the 5711 is particularly suited for sensitive flat panels where fast discharge times and low swing voltages are desired. The shorter bar length of the 5711 is ideal for space constrained tools in both the flat panel and backend semiconductor processes. The μWire AeroBar utilizes MicroPulse technology applied to a corona wire system for optimal performance. MicroPulse technology reduces ion recombination at the corona wire, thus increasing product efficiency and performance.
The 5711 includes all the latest design features of the μWire AeroBar to make the bar easier to clean and provide higher performance. Shields have been added to protect the corona wire contacts during the cleaning process, making it truly a “one swipe to clean” bar.